MnZn フェライト薄膜の微細構造に及ぼす熱処理雰囲気および添加物の効果 Effects of Additives and Annealing Atmospheres on the Microstructure of MnZn Ferrite Thin Films
Manganese zinc ferrite thin films were prepared on quartz substrates buffered by a (00l) oriented ZnO underlayer by conventional rf magnetron sputtering method Mn-Zn-Fe oxide layers deposited on the ZnO underlayers were annealed in various atmospheres at 800°C for 5hours. When the films were annealed either at reduced pressure in air or in N<SUB>2</SUB> gas flow, single phase spinel-type ferrite was formed. Manganese zinc ferrite films annealed in N<SUB>2</SUB> gas flow had excellent soft magnetic characteristics compared with the films annealed at reduced pressure in air because of their remarkable grain growth. Furthermore, Bi<SUB>2</SUB>O<SUB>3</SUB> and V<SUB>2</SUB>O<SUB>5</SUB> were added for the purpose of inducing crystal grain growth. Manganese zinc ferrite films with Bi<SUB>2</SUB>O<SUB>3</SUB> were improved in their saturation magnetization because of their grain growth and good crystallinity. On the other hand, manganese zinc ferrite films with V<SUB>2</SUB>O<SUB>5</SUB> showed excellent soft magnetic characteristics, when vanadium of 0.51 at.% was added.
粉体および粉末冶金 49(2), 108-113, 2002-02-15
Japan Society of Powder and Powder Metallurgy