新しい結晶成長技術化学気相たい積法によるSiCエピタキシャル成長における大型らせん転位の分解  [in Japanese] Dissociation of large screw dislocation via SiC epitaxial growth by CVD  [in Japanese]

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Author(s)

Journal

  • 應用物理

    應用物理 71(5), 576-577, 2002-05-10

References:  7

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    木本恒暢

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    SI W.

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Codes

  • NII Article ID (NAID)
    10008201098
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    NOT
  • ISSN
    03698009
  • Data Source
    CJP 
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