隔膜真空計における熱遷移現象の数値解析  [in Japanese] Numerical Simulation of Thermal Transpiration of Capacitance Diaphragm Gauge  [in Japanese]

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Author(s)

Abstract

The Capacitance diaphragm gauge (CDG) is one of the most important vacuum gauges in low and middle vacuum ranges. The difference of temperature between the sensor head and the vacuum chamber gives a non-linear sensitivity of the gauge depending on the pressure due to thermal transpiration effect. Change in the sensitivity of about 4% between molecular flow regime and viscous flow regime is significant for metrological use of the gauge. In this study, by using a DSMC method, pressure distribution in the connecting tube of the gauge was obtained under the pressure range from molecular flow regime to viscous flow regime with taking account of temperature distribution along the connecting tube. It was in good agreement with the pressure dependence of sensitivity obtained by static expansion system experimentally. Furthermore, influence of gas-surface interaction on the thermal transpiration was also discussed.

Journal

  • Shinku

    Shinku 45(3), 119-122, 2002-03-20

    The Vacuum Society of Japan

References:  2

  • <no title>

    BIRD G. A.

    Molecuar GasDunamics and the Direct Simulation of Gas Flows, 1994

    Cited by (1)

  • <no title>

    TAKAISHI T.

    Trans. Faraday Soc. 59, 2503, 1963

    DOI  Cited by (9)

Codes

  • NII Article ID (NAID)
    10008202764
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144075
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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