無電解めっき処理エポキシ樹脂のガス放出特性

書誌事項

タイトル別名
  • Outgassing Characteristics of Electroless Plated Epoxy Resin.
  • ムデンカイメッキ ショリ エポキシ ジュシ ノ ガス ホウシュツ トクセイ

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抄録

Outgassing rate of an epoxy resin is the most important property in application of an epoxy resin for semiconductor processing in a high vacuum environment. Main desorbed gases is H2O from the surface and the inside of the epoxy resin.<BR>Electroless plating process was improved by Cu and Ni plating and the impregnation of the epoxy resin on pre-etching process. Outgassing rate of the epoxy resin plated Cu and Ni layer was two orders of magnitude smaller than that of nonplated epoxy resin.

収録刊行物

  • 真空

    真空 45 (3), 142-144, 2002

    一般社団法人 日本真空学会

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