チタンターゲットスパッタにおけるチタンイオンの分光測定  [in Japanese] Optical Spectroscopy for Titanium Ions in Titanium Magnetron Sputtering  [in Japanese]

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Author(s)

Abstract

Plasma diagnostics in titanium (Ti) rf (13.56 MHz) magnetron sputtering were carried out using optical emission spectroscopy and atomic absorption spectrometry. Ti ions (Ti II) optical emission intensity in pure argon (Ar) discharge was compared with calculated optical emission intensity. Ti II absorption signal was obtained using absorption line of 336.1 nm, 337.3 nm, 338.4 nm (α<SUP>4</SUP><I>F</I>-<I>z</I><SUP>4</SUP><I>G</I>°). The dependence of Ti II optical emission intensity on rf power and Ar pressure was also investigated.

Journal

  • Shinku

    Shinku 45(3), 169-172, 2002-03-20

    The Vacuum Society of Japan

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Codes

  • NII Article ID (NAID)
    10008202869
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144180
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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