容量結合型高周波放電における陽極表面状態の影響  [in Japanese] Effects of the Anode Surfaces on Capacitive Coupled RF Plasmas  [in Japanese]

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Author(s)

    • 久保 隆 KUBO Takashi
    • 広島国際学院大学工学部電子工学科 Department of Electronics, Faculty of Engineering, Hiroshima Kokusai Gakuin University
    • 田中 誠 TANAKA Makoto
    • 広島国際学院大学工学部電子工学科 Department of Electronics, Faculty of Engineering, Hiroshima Kokusai Gakuin University

Abstract

In this paper, the dependence of the surface conditions of the anode on the discharges was studied using the asymmetrical parallel plate radio frequency plasma reactor. In order to change the surface condition, aluminum foils were fixed on the anode made of stainless steel. In any cases, the one-dimensional distributions of the electron densities and plasma potentials were measured by using the self-compensated Langmuir probe.<BR>The results indicate that the change of the anode surface influences the spatial distribution of electron density near the cathode.

Journal

  • Shinku

    Shinku 45(3), 173-176, 2002-03-20

    The Vacuum Society of Japan

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Codes

  • NII Article ID (NAID)
    10008202878
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144186
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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