容量結合型高周波放電における陽極表面状態の影響 [in Japanese] Effects of the Anode Surfaces on Capacitive Coupled RF Plasmas [in Japanese]
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In this paper, the dependence of the surface conditions of the anode on the discharges was studied using the asymmetrical parallel plate radio frequency plasma reactor. In order to change the surface condition, aluminum foils were fixed on the anode made of stainless steel. In any cases, the one-dimensional distributions of the electron densities and plasma potentials were measured by using the self-compensated Langmuir probe.<BR>The results indicate that the change of the anode surface influences the spatial distribution of electron density near the cathode.
Shinku 45(3), 173-176, 2002-03-20
The Vacuum Society of Japan