イオンビームスパッタリング法による窒化炭素系積層多層薄膜の合成と評価 Characterization of MN/CN_x (M : Ti, Zr) Multilayer Thin Films Prepared by Ion Beam Sputtering Method

この論文にアクセスする

この論文をさがす

著者

抄録

TiN/CN<SUB>x</SUB> and ZrN/CN<SUB>x</SUB> multilayered thin films were deposited on Corning#7059 glass substrates by a dual ion beam sputtering (IBS) system with an Ar ion source for sputtering the target and a N<SUB>2</SUB> ion source for bombarding the substrate. The multilayered thin films were deposited by alternately sputtering Ti or Zr and C targets. Total film thickness was 400 nm and multilayered period λ changed from 5 to 160 nm. The properties of the multilayered thin films were examined by X-ray diffraction (XRD), cross-sectional scanning electron microscopy (SEM), Knoop indenter, and the internal residual stress of the multilayered thin films were examined by multi-beam optical sensor (MOS).<BR>The low angle XRD patterns of the both multilayered thin films exhibited a characteristic of long-range modulation structure. TiN/CN<SUB>x</SUB> multilayered films consisted from microcrystalline TiN and amorphous CN<SUB>x</SUB> exhibited an increasing of TiN crystallization and a strong TiN (200) preferred crystal orientation. The deposited multilayered thin films indicated a maximum value in hardness and the large internal residual stress generation in a function of the multilayered periods λ.

収録刊行物

  • 真空

    真空 45(3), 208-211, 2002-03-20

    The Vacuum Society of Japan

参考文献:  11件中 1-11件 を表示

  • <no title>

    YASHAR P.

    J. Vac. Sci. Technol. A 16, 1998

    被引用文献1件

  • <no title>

    玉岡克康

    真空 42, 265, 1999

    被引用文献2件

  • <no title>

    中山明

    真空 30, 55, 1994

    被引用文献3件

  • <no title>

    PANJAN P.

    Surf.Coat.Technol. 98, 1497, 1998

    被引用文献2件

  • <no title>

    TAYLOR C.

    The Industrial Physicist March 25, 1998

    被引用文献1件

  • <no title>

    NORDIN M.

    Surf. Coat. Technol. 234, 1998

    被引用文献1件

  • <no title>

    TAVARES C. J.

    J.Bessa e Sousa Surf.Coat.Technol. 100-101, 65, 1998

    被引用文献2件

  • <no title>

    柴田淳

    非破壊検査 48, 324, 1999

    被引用文献1件

  • <no title>

    MADAN A.

    J.Appl.Phys. 84, 776, 1998

    被引用文献2件

  • <no title>

    HELMERSON U.

    J. Appl. Phys. 62, 481, 1987

    被引用文献3件

  • <no title>

    矢田雅規

    応用物理 59, 1604, 1990

    被引用文献3件

各種コード

  • NII論文ID(NAID)
    10008202969
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6144316
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ