ポリテトラフルオロエチレン/金属系多層薄膜における界面エネルギーの内部応力と硬さに与える影響 [in Japanese] Effects of Interfacial Energy on Internal Stress and Hardness in Polytetrafluoroethylene/Metal System Multilayered Films [in Japanese]
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Polytetrafluoroethylene (PTFE) /Al or Ti multilayered films have been deposited in order to investigate effects of interfacial energy on internal stress and hardness. The total thickness of the multilayered films was fixed at 200 nm. Modulation period of the multilayered films was changed from 6.6 nm to 200 nm. Internal stress within metal layers was estimated from strain obtained by X-ray diffraction measurements. Hardness of films was measured by a nano-indentation method. Internal stress observed is compressive and increases with decreasing modulation period. The maximum of internal stress was approximately 10 times larger than that calculated from the value of the accumulated interfacial energy. The hardness also increases with decreasing modulation period. The decrease in the hardness shows a good agreement with the increase in the internal stress. It is concluded that the hardness enhancement strongly relates to the increase in internal stress in PTFE/metal multilayered films.
Shinku 45(3), 223-226, 2002-03-20
The Vacuum Society of Japan