ポリテトラフルオロエチレン/金属系多層薄膜における界面エネルギーの内部応力と硬さに与える影響  [in Japanese] Effects of Interfacial Energy on Internal Stress and Hardness in Polytetrafluoroethylene/Metal System Multilayered Films  [in Japanese]

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Author(s)

Abstract

Polytetrafluoroethylene (PTFE) /Al or Ti multilayered films have been deposited in order to investigate effects of interfacial energy on internal stress and hardness. The total thickness of the multilayered films was fixed at 200 nm. Modulation period of the multilayered films was changed from 6.6 nm to 200 nm. Internal stress within metal layers was estimated from strain obtained by X-ray diffraction measurements. Hardness of films was measured by a nano-indentation method. Internal stress observed is compressive and increases with decreasing modulation period. The maximum of internal stress was approximately 10 times larger than that calculated from the value of the accumulated interfacial energy. The hardness also increases with decreasing modulation period. The decrease in the hardness shows a good agreement with the increase in the internal stress. It is concluded that the hardness enhancement strongly relates to the increase in internal stress in PTFE/metal multilayered films.

Journal

  • Shinku

    Shinku 45(3), 223-226, 2002-03-20

    The Vacuum Society of Japan

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Codes

  • NII Article ID (NAID)
    10008203005
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144523
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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