高出力パルスレーザーを用いたパルスレーザー堆積法で作製した鉄シリサイド(β-FeSi_2)薄膜  [in Japanese] Iron Disilicide (β-FeSi_2) Thin Films Prepared by Pulsed Laser Deposition Using High Power Pulse Laser  [in Japanese]

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Author(s)

    • 鈴木 晶雄 SUZUKI Akio
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 三津橋 武 MITSHUHASHI Takeshi
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 池田 和巧 IKEDA Kazuyoshi
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 青木 孝憲 AOKI Takanori
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 松下 辰彦 MATSUSHITA Tatsuhiko
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 奥田 昌宏 OKUDA Masahiro
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Abstract

Iron disilicide (β-FeSi<SUB>2</SUB>) thin films were deposited on Si (001) substrate by a pulsed laser deposition using an ArF excimer laser of high power. The film compositions were varied by changing the ratio (trace ratio) of the time required to irradiate each side of the split target made of silicon and iron. It was confirmed from Hall effect measurement that the conduction type of the film changed from p type to n type when the trace ratio varied from 3.2 to 4. From XRD spectra of these films, peaks of β-FeSi<SUB>2</SUB> (422) and (800) were identified. It was found from FE-SEM and AFM observations that the β-FeSi<SUB>2</SUB> films with small surface roughness (Ra =7.36 nm) were obtained and there were little droplets on the film surfaces.

Journal

  • Shinku

    Shinku 45(3), 239-242, 2002-03-20

    The Vacuum Society of Japan

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Codes

  • NII Article ID (NAID)
    10008203050
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144562
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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