ブルーレーザー対応型光ディスクにおける特性の改善  [in Japanese] Improvement of Characteristics on Optical Disk at the Wavelength of Blue Laser  [in Japanese]

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Author(s)

    • 青木 孝憲 AOKI Takanori
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 秋月 真 AKIDUKI Shin
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 鈴木 晶雄 [他] SUZUKI Akio
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 松下 辰彦 MATSUSHITA Tatsuhiko
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 奥田 昌宏 OKUDA Masahiro
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Abstract

Thin films (of 50 nm thick) with a stacked structure (of 10150 layers) of In<SUB>2</SUB>O<SUB>3</SUB> and ZnO have been deposited onto the glass and the polycarbonate substrates using the split target consisting of In<SUB>2</SUB>O<SUB>3</SUB> and ZnO by a pulsed laser technique with an ArF excimer laser. A relation of the transmittance change ΔT at the wavelength of 400 nm between the annealed state (480°C × 20 min) and the as-deposited state versus the number of layers for the structure fabricated at the trace ratio of In<SUB>2</SUB>O<SUB>3</SUB> : ZnO = 1 : 1 was obtained. The structure with 20 layers showed the maximal value of ΔT. SEM observation revealed that the surfaces of these films were enough smooth to use in static or revolution tests for'write'. AFM observation showed that surface roughness of the as-deposited state and the annealed state were Ra of 0.76 nm and Ra of 2.25 nm respectively. A peak power dependence of CNR of 3T signal (λ = 406 nm, NA = 0.65) at a linear velocity of 5 m/s and a read power of 0.6 mW was measured for the disk samples with 60-layers fabricated for the revolution tests. That the write power of less than 3 mW was required and maximal value of CNR = 67 dB was obtained. The values of CNR could be improved by optimizing the number of layers and the film compositions.

Journal

  • Shinku

    Shinku 45(3), 247-250, 2002-03-20

    The Vacuum Society of Japan

References:  3

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    鈴木

    第8回相変化記録研究会シンポジウム予稿集 12, 1996

    Cited by (2)

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    青木

    真空 42(3), 179, 1999

    Cited by (1)

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    AOKI T.

    PCOS '98 37

    Cited by (2)

Codes

  • NII Article ID (NAID)
    10008203081
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144611
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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