水素ガスを使ったチタニウム酸化膜の昇温脱離定量動的評価 Dynamical Estimation of Titanium Oxide Film with Molecular Hydrogen in Thermal Desorption Spectra
Dynamical behaviors of hydrogen molecules from titanium oxides on a titanium surface were examined with thermal desorption spectroscopy (TDS). The oxide film on a titanium surface has been formed in an oxygen gas with a pressure of 1 × 10<SUP>-4</SUP> Pa at a temperature of 400°C. The specimen was exposed in a hydrogen gas at a pressure of 1 × 10<SUP>4</SUP> Pa after the oxidation. The TD spectra of hydrogen from the titanium oxide surface have shown three peaks.
真空 45(3), 265-268, 2002-03-20
The Vacuum Society of Japan