水素ガスを使ったチタニウム酸化膜の昇温脱離定量動的評価  [in Japanese] Dynamical Estimation of Titanium Oxide Film with Molecular Hydrogen in Thermal Desorption Spectra  [in Japanese]

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Author(s)

Abstract

Dynamical behaviors of hydrogen molecules from titanium oxides on a titanium surface were examined with thermal desorption spectroscopy (TDS). The oxide film on a titanium surface has been formed in an oxygen gas with a pressure of 1 × 10<SUP>-4</SUP> Pa at a temperature of 400°C. The specimen was exposed in a hydrogen gas at a pressure of 1 × 10<SUP>4</SUP> Pa after the oxidation. The TD spectra of hydrogen from the titanium oxide surface have shown three peaks.

Journal

  • Shinku

    Shinku 45(3), 265-268, 2002-03-20

    The Vacuum Society of Japan

References:  4

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    藤田大介

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    Cited by (1)

Codes

  • NII Article ID (NAID)
    10008203110
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    05598516
  • NDL Article ID
    6144645
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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