偏光解析法による水分子吸着量変化の測定 Measurement of Variations in Water Adsorption by the Ellipsometry
In order to improve the stability of mass standards, it is necessary to estimate the amount of the water adsorption on the surface of a weight. In this report the physical adsorption of water molecules on a stainless steel weight was measured using an ellipsometer. The variations in the physical adsorption was determined to be in the range from 0.022μg/cm<SUP>2</SUP> to 0.036μg/cm<SUP>2</SUP> for the change in the relative humidity from 0.8% to 45%. The sensitivity used for this calculation was estimated using a five-medium model consisting of air, water adsorption layer, oxide layer, surface roughness, and substrate.
真空 45(3), 289-292, 2002-03-20
The Vacuum Society of Japan