スパッタリング法による薄膜3層構造を有した固体酸化物燃料電池の作製条件の検討  [in Japanese] Preparation of Solid Oxide Fuel Cell Having a Three-Layer Film Structure Grown by RF Magnetron Sputtering  [in Japanese]

Access this Article

Search this Article

Author(s)

Abstract

Solid oxide fuel cell (SOFC) having a three-layer film of Ni/YSZ/Ni structure with 20-40μm was prepared on the porous Al<SUB>2</SUB>O<SUB>3</SUB> substrate by RF magnetron sputtering. The structural and electrical properties of the YSZ electrolyte and Ni electrode films were investigated for various layer thicknesses. Ni electrode film grown at an RF power of 300 W indicated the columnar structure and resistivity of the film decreased with increasing layer thickness. Although conductivity of a SOFC having a three-layer film grown on the Al<SUB>2</SUB>O<SUB>3</SUB> substrate increased with increasing layer thickness, its value was reduced by two order compared with theoretical one, because YSZ electrolyte was deformed to structure with many pores by the thermal energy.

Journal

  • Shinku

    Shinku 45(3), 305-308, 2002-03-20

    The Vacuum Society of Japan

References:  4

  • <no title>

    田川博章

    固体酸化物燃料電池と地球環境, 1998

    Cited by (13)

  • <no title>

    長田

    真空 42(3), 151-154, 1999

    Cited by (1)

  • <no title>

    OKAYAMA H.

    Proceedings on The 6th International Symposium on Sputtering & Plasma Processes, ISSP 2001 Committee 1(1), 374-377, 2001

    Cited by (1)

  • <no title>

    日本化学会編

    電気 磁気, 丸善 170, 1991

    Cited by (1)

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008203188
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    05598516
  • NDL Article ID
    6144756
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
Page Top