スパッタリング法による薄膜3層構造を有した固体酸化物燃料電池の作製条件の検討 Preparation of Solid Oxide Fuel Cell Having a Three-Layer Film Structure Grown by RF Magnetron Sputtering
Solid oxide fuel cell (SOFC) having a three-layer film of Ni/YSZ/Ni structure with 20-40μm was prepared on the porous Al<SUB>2</SUB>O<SUB>3</SUB> substrate by RF magnetron sputtering. The structural and electrical properties of the YSZ electrolyte and Ni electrode films were investigated for various layer thicknesses. Ni electrode film grown at an RF power of 300 W indicated the columnar structure and resistivity of the film decreased with increasing layer thickness. Although conductivity of a SOFC having a three-layer film grown on the Al<SUB>2</SUB>O<SUB>3</SUB> substrate increased with increasing layer thickness, its value was reduced by two order compared with theoretical one, because YSZ electrolyte was deformed to structure with many pores by the thermal energy.
真空 45(3), 305-308, 2002-03-20
The Vacuum Society of Japan