Stable Operation Region and Dynamic Behavior of Ar Pulse-Modulated Induction Thermal Plasma with Different Molecular Gases

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  • 各種ガス混入大気圧パルス変調Ar誘導熱プラズマの安定維持範囲と過渡応答特性
  • カクシュ ガス コンニュウ タイキアツ パルス ヘンチョウ Ar ユウドウ ネツ プラズマ ノ アンテイ イジ ハンイ ト カト オウトウ トクセイ

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Abstract

The pulse-modulated induction thermal plasma (PMITP) was established in Ar gas with additional gases such as H2, O2, N2 and CO2 to investigate the effects of various gas inclusions upon the transient characteristics of thermal plasma. The dynamic response times of the thermal plasmas were estimated from the measured time-varying radiation intensity of Ar spectral line. Furthermore, time evolution of the Ar excitation temperature was determined by the two-line method. The results indicated that especially in Ar-CO2 PMITP, decreasing lower current level in a modulation cycle raised the on-delay time which means a recovery time from low temperature state to high temperature one. In addition, the inclusion of CO2 in Ar PMITP caused lower temperatures just before the on-operation compared with other gases used in the experiment.

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