LSIの新境地を開くスーパーコネクト  [in Japanese] Super-Connect Technology  [in Japanese]

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Author(s)

    • 桜井 貴康 SAKURAI Takayasu
    • 東京大学国際・産学共同研究センターおよび生産技術研究所 Center for Collaborative Research, and Institute of Industrial Science, University of Tokyo

Journal

  • Journal of The Surface Finishing Society of Japan

    Journal of The Surface Finishing Society of Japan 53(4), 224-227, 2002-04-01

    The Surface Finishing Society of Japan

References:  7

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008222272
  • NII NACSIS-CAT ID (NCID)
    AN1005202X
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09151869
  • NDL Article ID
    6143930
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-291
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
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