ウェーハレベル3次元集積化技術  [in Japanese] Wafer Level Three Dimensional Integration Technology  [in Japanese]

Access this Article

Search this Article

Author(s)

Journal

  • Journal of The Surface Finishing Society of Japan

    Journal of The Surface Finishing Society of Japan 53(4), 228-232, 2002-04-01

    The Surface Finishing Society of Japan

References:  9

Codes

  • NII Article ID (NAID)
    10008222280
  • NII NACSIS-CAT ID (NCID)
    AN1005202X
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    09151869
  • NDL Article ID
    6143947
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-291
  • Data Source
    CJP  NDL  J-STAGE 
Page Top