Ｔｉ‐Ｎｉスパッタ膜の超弾性

• 佐藤 守夫

  独立行政法人物質・材料研究機構材料研究所

• 石田 章

  独立行政法人物質・材料研究機構材料研究所

書誌事項

タイトル別名

• Superelasticity of Sputter-Deposited Ti-Ni Thin Films.
• Ti Ni スパッタ マク ノ チョウダンセイ

抄録

The superelasticity of Ti-48.3, 50.0 and 51.5 at% Ni thin films was evaluated by measuring the stress-strain curves on loading and unloading. It was found that perfect superelasticity is obtainable above the reverse R phase transformation finish temperature for both the Ti-48.3 at% Ni and Ti-51.5 at% Ni thin films, while the Ti-50.0 at% Ni thin film does not show perfect superelasticity. The Ti-50.0 at% Ni thin film was found to be susceptible to plastic deformation because of a single phase. This plastic strain hinders the perfect shape recovery after unloading. In contrast, in the Ti-48.3 at% Ni thin film, crystallization from the amorphous state produces fine distribution of coherent Guinier-Preston zones. These precipitates are considered to impede plastic deformation during stress-induced martensitic transformation, resulting in a perfect shape recovery after unloading, that is, a perfect superelasticity. On the other hand, in the Ti-51.5 at% Ni thin film subjected to solution and aging treatments, fine distribution of Ti₃Ni₄ was observed and this fine precipitate is considered to be responsible for perfect superelasticity by suppression of plastic deformation.

収録刊行物

• 表面技術

  表面技術 53 (4), 267-272, 2002

  一般社団法人 表面技術協会

キーワード

• Superelasticity
• Sputtering
• TiNi
• Shape Memory Alloy
• Stress-Strain Curve

詳細情報

• CRID: 1390001204113598592
• NII論文ID: 10008222365
• NII書誌ID: AN1005202X
• DOI: 10.4139/sfj.53.267
• ISSN: 18843409
• ISSN: 09151869
• NDL書誌ID: 6144068
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6144068
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可