Fluid drive chips containing multiple pumps and switching valves for biochemical IC family-Development of SMA 3D micro pumps and valves in leak-free polymer package-

• IKUTA K.

収録刊行物

• Proc of IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2000)

  Proc of IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2000) 739-744, 2000

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• CRID: 1571417124623265536
• NII論文ID: 10008374282
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  • CiNii Articles