PREPARATION OF FLUORINE ADOSORBED Si(100) SURFACE

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Author(s)

    • OKABAYASHI N.
    • Institute of Physics, Graduate School of Arts and Science, University of Tokyo
    • TORII H. A.
    • Institute of Physics, Graduate School of Arts and Science, University of Tokyo
    • KOMAKI K.
    • Institute of Physics, Graduate School of Arts and Science, University of Tokyo
    • YAMAZAKI Y
    • Institute of Physics, Graduate School of Arts and Science, University of Tokyo

Journal

  • Atomic collision research in Japan

    Atomic collision research in Japan 27, 15-17, 2001-12-15

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Codes

  • NII Article ID (NAID)
    10008431354
  • NII NACSIS-CAT ID (NCID)
    AA11068271
  • Text Lang
    ENG
  • Article Type
    ART
  • Data Source
    CJP 
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