Role of Slurry Flow Rate and Solids Content on Critical Tribological and Fluid Dynamics Attributes of ILD CMP

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Author(s)

    • PHILIPOSSIAN Ara
    • Department of Chemical and Environmental Engineering University of Arizona
    • OLSEN Scott
    • Department of Chemical and Environmental Engineering University of Arizona
    • MITCHELL Erin
    • Department of Chemical and Environmental Engineering University of Arizona

Journal

  • 精密工学会大会学術講演会講演論文集

    精密工学会大会学術講演会講演論文集 2002(1), 504-505, 2002-03-01

References:  3

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    TSENG

    J Electrochem. Soc 144, 1997

    Cited by (1)

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    MAHAJAN

    MRS Symposium Proceedings 566, 2000

    Cited by (1)

  • <no title>

    DANCKWERTS

    Chem. Eng. Sci. 2(1), 1953

    Cited by (1)

Codes

  • NII Article ID (NAID)
    10008500887
  • NII NACSIS-CAT ID (NCID)
    AN1018673X
  • Text Lang
    ENG
  • Article Type
    SHO
  • Data Source
    CJP 
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