レーザー解説 Precise Structuring Using Femtosecond Lasers (「フェムト秒レーザーによる無機材料の微細加工」解説小特集号) Precise Structuring Using Femtosecond Lasers

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Author(s)

Abstract

Femtosecond (fs) lasers are perfect laser sources for material processing when highest accuracy and smallest structure sizes are required. Due to the ultrashort interaction time and the high peak power the process is generally characterized by the absence of heat diffusion and, consequently, molten layers. Moreover, the process is nearly independent of the material and recent results demonstrate the possibility to ablate material with sub-μm accuracy or even nm dimension while maintaining an outstanding reproducibility. Also, certain technically important materials like metals with high heat conductivity, semiconductors, and dielectrics with high transparency in the visible and uv can be processed by fs laser pulses which have been unable to machine so far with conventional laser radiation. In contrast to longer laser pulses, the absorption and ablation process can be described in a more simple way resulting in a higher reproducibility and controlability of the process.<br>Besides the microelectronics industry there are numerous potential applications in the field of automotive supplier industry, medicine technology and finally telecommunication.

Journal

  • The Review of Laser Engineering

    The Review of Laser Engineering 30(5), 221-225, 2002-05-15

    The Laser Society of Japan

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Codes

  • NII Article ID (NAID)
    10008508745
  • NII NACSIS-CAT ID (NCID)
    AN00255326
  • Text Lang
    ENG
  • Article Type
    Journal Article
  • ISSN
    03870200
  • NDL Article ID
    6168092
  • NDL Source Classification
    ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
  • NDL Call No.
    Z16-1040
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
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