Functionalization of Transparent Dielectric Materials by Femtosecond Fabrication with Super-Resolution.

• MISAWA Hiroaki

  Department of Ecosystem Engineering Graduate School of Engineering, The University of Tokushima

Bibliographic Information

Other Title

• フェムト秒超加工による透明誘電体材料の機能化
• レーザー解説 フェムト秒超加工による透明誘電体材料の機能化
• レーザー カイセツ フェムトビョウ チョウカコウ ニ ヨル トウメイ ユウデンタイ ザイリョウ ノ キノウカ

Abstract

Functionalization of dielectric materials such as crystals, glasses (silica-related or polymers), and liquid polymerizable resins by femtosecond (100-500 fs) irradiation is summarized. The modification was carried out by employing tight focusing optics with numerical aperture typically NA > 0.6. This allows to produce 3D optical memory and photonic crystals (PhC) by implementing a principle of the focal spot scanning inside silica glass or polymerizable resin. PhCs can be also fabricated by encoding the 3D hologram in negative polymer photoresist. Optically modified regions of dielectric were found to respond sensitively to wet etching. The contrast in the etching rate is over 50, which makes it possible to fabricate 3D channels for microfluidics inside dielectrics.

Journal

• The Review of Laser Engineering

  The Review of Laser Engineering 30 (5), 239-243, 2002

  The Laser Society of Japan

Keywords

• Femtosecond-super-fabrication
• Femtosecond laser
• Photonic crystal
• Silica glass
• Photopolymerizable resin

Details

• CRID: 1390001204645555200
• NII Article ID: 10008508823
• NII Book ID: AN00255326
• DOI: 10.2184/lsj.30.239
• COI: 1:CAS:528:DC%2BD38XlvVGqsLc%3D
• ISSN: 13496603
• ISSN: 03870200
• ISSN: http://id.crossref.org/issn/03870200
• NDL BIB ID: 6168130
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6168130
• Web Site: http://www.jstage.jst.go.jp/article/lsj/30/5/30_5_239/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed