SnO<SUB>2</SUB>薄膜センサのホルムアルデヒド検出における適応線スペクトル強調器の応用

• 尾崎 知幸

  鳥取大学

• 菅原 一孔

  鳥取大学

• 小西 亮介

  鳥取大学

書誌事項

タイトル別名

• Application of the Adaptive Line Enhancer in Formaldehyde Detection of SnO<SUB>2</SUB> Thin Film Sensor
• SnO2薄膜センサのホルムアルデヒド検出における適応線スペクトル強調器の応用
• SnO2 ハクマク センサ ノ ホルムアルデヒド ケンシュツ ニ オケル テキオウセン スペクトル キョウチョウキ ノ オウヨウ

抄録

The volatile organic compound (VOC) is contained in indoor materials in buildings, such as paints and adhesives. The formaldehyde is a representative example of the chemical substances which affect people’s health. For detection of formaldehyde, we made SnO₂ thin-film type sensors by the DC magnetron sputtering method. The sensor has Pt electrodes on one side of a glass substrate as the heater. The thickness of the heater is 500 nm. The SnO₂ thin film is sputtered on the opposite side of the heater. The thickness of SnO₂ thin film is 200 nm. Ag(1.6 wt.%) is added as a catalyst metal. As formaldehyde is low concentration of less than 1 ppm, the output signal from sensor is buried in noise, which is generated from the heater. The noise is considered as white noise. In this paper, noise cancellation method by using Adaptive Line Enhancer(ALE) is proposed to extract the sensor outputs. The least-square method (LMS) is adopted for the adaptive algorithm in the ALE. As a result of noise cancellation by using the ALE, the formaldehyde of 0.1 ppm concentration can be detected.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 122 (6), 345-348, 2002

  一般社団法人 電気学会

キーワード

• 環境センサ
• 適応線スペクトル強調器
• ホルムアルデヒド
• VOC
• SnO<SUB>2</SUB>

詳細情報

• CRID: 1390282679438619648
• NII論文ID: 130005403965
• NII論文ID: 10008510517
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.122.345
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 6174895
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6174895
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/122/6/122_6_345/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可