イオンビームおよびプラズマプロセスによる大型成形金型の表面処理  [in Japanese] Large-Area Treatment of Forming Tools by Ion Beam and Plasma Processing  [in Japanese]

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Author(s)

Journal

  • Ceramics Japan

    Ceramics Japan 37(1), 36-38, 2002-01-01

    日本セラミックス協会

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    HE X. M.

    J. Vac. Sci. Technol. B17, 822, 1999

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    CULBERTSON R. J.

    Nucl. Instr. And Meth. B56(57), 652, 1991

    DOI  Cited by (1)

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008568603
  • NII NACSIS-CAT ID (NCID)
    AN00131516
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    0009031X
  • NDL Article ID
    6026654
  • NDL Source Classification
    ZP9(科学技術--化学・化学工業--無機化学・無機化学工業--セラミックス・窯業)
  • NDL Call No.
    Z17-206
  • Data Source
    CJP  CJPref  NDL 
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