水蒸気吸着に伴う微細カンチレバーのたわみ変位の解析  [in Japanese] Deflection Analysis of Micro Cantilever Due to Moisture Adsorption  [in Japanese]

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Author(s)

    • 河合 晃 KAWAI Akira
    • 長岡技術科学大学 工学部 電気系 Department of Electrical Engineering, Nagaoka University of Technology

Journal

  • Journal of the Adhesion Society of Japan

    Journal of the Adhesion Society of Japan 38(5), 169-172, 2002-05-01

    日本接着学会

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Codes

  • NII Article ID (NAID)
    10008574822
  • NII NACSIS-CAT ID (NCID)
    AN10341672
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    09164812
  • NDL Article ID
    6162138
  • NDL Source Classification
    ZP16(科学技術--化学・化学工業--高分子化学・高分子化学工業)
  • NDL Call No.
    Z17-134
  • Data Source
    CJP  NDL 
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