大気開放静電容量型マイクロ加速度センサの製作とその特性評価  [in Japanese] Evaluation of an Open-air type Silicon Capacitive Micro Accelerometer  [in Japanese]

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Author(s)

Journal

  • 物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference

    物理探査学会学術講演会講演論文集 = Proceeding of the SEGJ Conference 106, 101-104, 2002-05-22

References:  3

Codes

  • NII Article ID (NAID)
    10008594209
  • NII NACSIS-CAT ID (NCID)
    AN10532932
  • Text Lang
    JPN
  • Article Type
    ART
  • Data Source
    CJP 
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