機械加工によるマイクロ加工およびナノ加工への挑戦  [in Japanese] Nanometer-and Micrometer-Scale Fabrication Technologies Based on Mechanical Process  [in Japanese]

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Author(s)

    • 森田 昇 MORITA Noboru
    • 富山大学 工学部機械知能システム工学科 Department of Mechanical and Intellectual Systems Engineering, Faculty of Engineering, Toyama University

Journal

  • Journal of Japanese Society of Tribologists

    Journal of Japanese Society of Tribologists 47(6), 463-468, 2002-06-15

    日本トライボロジ-学会

References:  8

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008630100
  • NII NACSIS-CAT ID (NCID)
    AN10056166
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09151168
  • NDL Article ID
    6187212
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-540
  • Data Source
    CJP  CJPref  NDL 
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