Photochemical etching technique for preparing high-quality TEM samples of n-type compound semiconductors

• Shigeyasu Tanaka

• Hideki Fujii

• Michio Hibino

書誌事項

タイトル別名

• Photochemical etching technique for pre

収録刊行物

• Journal of electron microscopy

  Journal of electron microscopy 46 (2), 129-133, 1997-04

  Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

詳細情報

• CRID: 1522262178362020352
• NII論文ID: 10008811554
• NII書誌ID: AA00697060
• ISSN: 00220744
• NDL書誌ID: 4231217
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4231217
• 本文言語コード: en
• NDL 雑誌分類:
  • ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
• データソース種別:
  • NDL
  • CiNii Articles