Protable scanning electron microscope designs
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- Khursheed A. KHURSHEED A.
- The Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), Electrical Engineering Department, National University of Singapore
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Author(s)
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- Khursheed A. KHURSHEED A.
- The Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR), Electrical Engineering Department, National University of Singapore
Journal
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- Journal of Electron Microscopy
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Journal of Electron Microscopy 47(6), 591-602, 1998-12-01
Published for the Japanese Society of Electron Microscopy by Oxford University Press
References: 7
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1
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KHUESHEED A.
Scanning 20, 87-91, 1998
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HAWKER P. W.
Magnetic Electron Lenses, 302-322, 1982
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LHURSHEED A.
KEOS: Khursheed Electron Optics Software, 1992
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4
- In-lens defectors for a LVSEM magnetic immersion objective lens
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ZHAO Y.
Proc. SPIE, Charged Particle Optics III 3155, 37-46, 1997
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THONG J. T. L.
Electron Beam Testing Technology, 213-218, 1993
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6
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HAWKES P. W.
Magnetic Electron Lenses 233, 1982
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7
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REIMER L.
Image Formation in Low Voltage Scanning Electron Microscopy. Tutorial Texts, (SPIE) Chater 1, 1993
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