A TEM study of local non-uniformities in epitaxial 2H-AlN films on Si(111)substrate

• Ute Kaiser

• I.I. Khodos

• J. Jinschek

書誌事項

タイトル別名

• TEM study of local non-uniformities in epitaxial 2H-AlN films on Si 111 substrate

収録刊行物

• Journal of electron microscopy

  Journal of electron microscopy 48 (5), 545-554, 1999

  Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

詳細情報

• CRID: 1524232504983452416
• NII論文ID: 10008815464
• NII書誌ID: AA00697060
• ISSN: 00220744
• NDL書誌ID: 4895070
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4895070
• 本文言語コード: en
• NDL 雑誌分類:
  • ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
• データソース種別:
  • NDL
  • CiNii Articles