Crystallization and resistivity decrease by heat-treatment in air of amorphous ITO thin films prepared by DC magnetron sputtering

• MORIKAWA H.

収録刊行物

• Proc. 4th Special Symp. Advanced Materials

  Proc. 4th Special Symp. Advanced Materials 307-310, 1998

詳細情報

• CRID: 1572261549565101568
• NII論文ID: 10008817093
• データソース種別:
  • CiNii Articles