非晶質製膜技術の進歩  [in Japanese] Progress in deposition technologies for amorphous materials  [in Japanese]

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Journal

  • 應用物理

    應用物理 71(7), 822, 2002-07-10

Codes

  • NII Article ID (NAID)
    10008830452
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    OTR
  • ISSN
    03698009
  • Data Source
    CJP 
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