アレイアンテナ式大面積 VHF-PCVD 装置  [in Japanese] Large area VHF-PCVD system using array antenna type electrodes  [in Japanese]

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Author(s)

Journal

  • 應用物理

    應用物理 71(7), 874-877, 2002-07-10

    応用物理学会

References:  5

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    KROLL U.

    Mater. Res. Soc. Symp. Proc. 557, 121, 1999

    Cited by (1)

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    ITO N.

    Proc. 28th IEEE Photovoltaic Specialists Conf. 900, 2000

    Cited by (1)

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    NAKAMURA N.

    Jpn. J. Appl. Phys. 28, 1762, 1989

    Cited by (16)

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    YAMAMOTO K.

    Proc. 2nd World Conf. Photovoltaic Solar Energy Conversion 1284, 1998

    Cited by (1)

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    FINGER F.

    J.Appl.Phys. 71, 5665, 1992

    DOI  Cited by (5)

Codes

  • NII Article ID (NAID)
    10008830617
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    03698009
  • NDL Article ID
    6210680
  • NDL Source Classification
    ZM17(科学技術--科学技術一般--力学・応用力学)
  • NDL Call No.
    Z15-243
  • Data Source
    CJP  NDL 
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