プラズマコーティング初期段階の TiN, TiCN および TiC 薄膜の集合組織 [in Japanese] Texture Formation of TiN, TiCN and TiC Films at Incipient Stage during Plasma Coating [in Japanese]
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The texture formation of TiN, TiCN and TiC films at the incipient stage during plasma coating on (011)  single crystals of silicon steel was investigated using the electron back scattering diffraction (EBSD) method.<BR>The orientation of very thin TiN film parallel to the normal direction (ND) exhibited separate (111) and (100) colonies of about 20-30 μm areas with low angles, whereas that to the rolling direction (RD) also exhibited separate <111> and <110> colonies.<BR>In contrast, the orientation of very thin TiCN and TiC films parallel to the ND and the RD was random.<BR>It should be noted that the smaller misfits of ceramic films and single crystals of silicon steel makes colonies coherent to the ND or the RD orientation at the incipient stage during plasma coating.
Shinku 45(5), 468-472, 2002-05-20
The Vacuum Society of Japan