酸リーチングによる多結晶シリコン中鉄, チタンの除去  [in Japanese] Removal of Iron and Titanium in Poly-Crystalline Silicon by Acid Leaching  [in Japanese]

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Author(s)

    • 三木 貴博 MIKI Takahiro
    • 東京大学大学院工学系研究科金属工学専攻 Department of Metallurgy, Graduate School of Engineering, The University of Tokyo
    • 森田 一樹 MORITA Kazuki
    • 東京大学大学院工学系研究科金属工学専攻 Department of Metallurgy, Graduate School of Engineering, The University of Tokyo

Abstract

Removal of Fe and Ti from Si by acid leaching method was examined, the optimum condition for acid leaching was obtained and the mechanism of removal of impurities in Si was estimated.<BR>Si-Ca-(Fe, Ti) alloys with various compositions were subjected to acid leaching procedure using aqua regia. For most of the samples, 85∼96% of Fe and 80∼93% of Ti were removed from Si and the effects of cooling rate and alloy composition were studied.<BR>Slow cooling (4.4 K/min) was found to be better for effective removal of impurities than quenching. In order to give a higher removal rate of iron, acid soluble CaSi<SUB>2</SUB> phase should be precipitated as a secondary phase, namely <I>X</I><SUB>Ca</SUB>⁄<I>X</I><SUB>Fe</SUB>>6.5. On the other hand, the optimum composition for the removal of Ti is considered to be <I>X</I><SUB>Ca</SUB>⁄<I>X</I><SUB>Ti</SUB>=3.

Journal

  • Journal of the Japan Institute of Metals and Materials

    Journal of the Japan Institute of Metals and Materials 66(5), 459-465, 2002-05-20

    The Japan Institute of Metals and Materials

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Codes

  • NII Article ID (NAID)
    10008833002
  • NII NACSIS-CAT ID (NCID)
    AN00062446
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    00214876
  • NDL Article ID
    6178968
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-314
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
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