高親水表面を利用した改良インピンジャー捕集法とこれを用いたクリーンルーム空気中の酸性,塩基性汚染物質の自動モニタ  [in Japanese] Improved Impinger Air Sampling Method by Using Highly Hydrophilic Surface and its Application to Automatic Monitor for Acidic or Basic Contaminations in Cleanroom Air  [in Japanese]

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Author(s)

Abstract

We have developed an automatic air monitoring apparatus for measuring trace amounts of acidic or basic contaminants in clean room air. The apparatus includes an ion chromatograph and uses a new air sampling method. Its absorbing vessel is a tube made of quartz glass whose inner surface is cleaned with ultraviolet light so as to be highly hydrophilic. When an air sample is bubbled into 6 ml of absorbing water, the bubbles rise stably to the upper part of the tube and the inner surface is coated with water film. Since the air sample has sufficient contact with the absorbing water, analytical components can be effectively absorbed into the water. It takes 27 min to analyze a sample consisting of organic and inorganic acid of more than 0.1 μg/m<SUP>3</SUP> in air.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 17(2), 83-88, 2002-06-20

    Japan Association of Aerosol Science and Technology

References:  5

  • <no title>

    FUJIMOTO T.

    Earozoru Kenkyu 14, 19-26, 1999

    Cited by (1)

  • <no title>

    SUZUKI Y.

    18th Annual Technical Meeting on Air Cleaning and Contamination Control, A-22, 2000

    Cited by (1)

  • <no title>

    HASE U.

    Kukiseijyo 35, 291-297, 1998

    Cited by (1)

  • <no title>

    DIONEX Corporation

    Installation Instructions and Troubleshooting Guide Column and IONPAC AS12A Analytical Column, 24-45, 1998

    Cited by (1)

  • <no title>

    DIONEX Corporation

    Application note, Application update 138, 1-3, 1998

    Cited by (1)

Codes

  • NII Article ID (NAID)
    10008837078
  • NII NACSIS-CAT ID (NCID)
    AN10041511
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    09122834
  • NDL Article ID
    6193513
  • NDL Call No.
    Z17-1062
  • Data Source
    CJP  NDL  J-STAGE 
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