LCD 工場向け循環空気用エアワッシャによる有機物の除去試験  [in Japanese] Removal Efficiency for Organic Compounds in Cleanroom Air by Air Washer at LCD Manufacturing Factory  [in Japanese]

Access this Article

Search this Article

Author(s)

Abstract

Many organic compounds are present in cleanroom air of liquid crystal display (LCD) manufacturing factories, it is therefore important to remove organic compounds from the clean room air. The purpose of this study is to investigate the removal performances of air washer for monoethanolamine (MEA), acetic acid and dimethyl sulfoxide (DMSO), which are commonly found in the LCD cleanroom air. In the removal test for a single component, the removal efficiency of MEA by air washer was 57 % and that of acetic acid was 38 % at the washer water/air ratio (<I>L</I>/<I>G</I>) of 0.8. In the test with the mixed gas, the removal efficiency of MEA, acetic acid, and DMSO by the air washer and cooling coils was 95 %, 97 %, and 92 % respectively. In the case of an actual LCD cleanroom equipped with the air washer in circulation air conditioning units, the concentration of MEA, acetic acid, and DMSO is estimated to decrease to 9 %, 28 %, and 10 % of that without the air washer.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 17(2), 89-95, 2002-06-20

    Japan Association of Aerosol Science and Technology

References:  20

  • <no title>

    HONDA S.

    Nihon Kentiku Gakkai Keikakukei Ronbunsyu 542, 63-69, 2001

    Cited by (1)

  • <no title>

    MURATA K.

    Proc. of IES, 128-134, 1996

    Cited by (1)

  • <no title>

    IIJIMA K.

    Proc. 15th Annual Tech. Meeting on Air Cleaning and Contamination Control., 75-78, 1997

    Cited by (1)

  • <no title>

    HINOKIYAMA K.

    Shinko Pantekku Gihou 41, 68-73, 1997

    Cited by (1)

  • <no title>

    WATANABE T.

    Proc. 16th Annual Tech. Meeting on Air Cleaning and Contamination Control, 1-4, 1998

    Cited by (1)

  • <no title>

    IIJIMA K.

    Proc. 16th Annual Tech. Meeting on Air Cleaning and Contamination Control, 9-12, 1998

    Cited by (1)

  • <no title>

    YOSHIZAKI S.

    Proc. 17th Annual Tech. Meeting on Air Cleaning and Contamination Control, 1-4, 1999

    Cited by (1)

  • <no title>

    HOSOYA M.

    Proc. 17th Annual Tech. Meeting on Air Cleaning and Contamination Control, 5-8, 1999

    Cited by (1)

  • <no title>

    SUZUKI S.

    Proc. 17th Annual Tech. Meeting on Air Cleaning and Contamination Control, 187-189, 1999

    Cited by (1)

  • <no title>

    INOUE M.

    Kuukityouwa Eiseikougakukai Ronbunnsyu 75, 81-88, 1999

    Cited by (1)

  • <no title>

    IWANAGA Y.

    Proc. 18th Annual Tech. Meeting on Air Cleaning and Contamination Control, 40-43, 2000

    Cited by (1)

  • <no title>

    OKADA H.

    Proc. 18th Annual Tech. Meeting on Air Cleaning and Contamination Control, 44-46, 2000

    Cited by (1)

  • <no title>

    YOSHIZAKI S.

    Proc. 18th Annual Tech. Meeting on Air Cleaning and Contamination Control, 47-49, 2000

    Cited by (1)

  • <no title>

    OKADA H.

    Proc. 19th Annual Tech. Meeting on Air Cleaning and Contamination Control, 155-157, 2001

    Cited by (1)

  • <no title>

    YOSHIZAKI S.

    Proc. 19th Annual Tech. Meeting on Air Cleaning and Contamination Control, 158-161, 2001

    Cited by (1)

  • <no title>

    FUJISAWA S.

    Proc. 19th Annual Tech. Meeting on Air Cleaning and Contamination Control, 166-168, 2001

    Cited by (1)

  • <no title>

    TAMURA M.

    Handoutai Kojyo no Syouenerugi Gijyutu no Doukou to Syouhi Enerugi Keisanhouhou, 25-30, 2001

    Cited by (1)

  • <no title>

    NAKAJIMA H.

    Gekkan Dhisupurei 7(10), 3-8, 2001

    Cited by (1)

  • <no title>

    Kagaku Binran Ouyougkagakuhen I Purosesuhen 590, 1986

    Cited by (1)

  • <no title>

    HONDA S.

    Nihon Kentiku Gakkai Keikakukei Ronbunsyu 542, 71-76, 2001

    Cited by (1)

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008837084
  • NII NACSIS-CAT ID (NCID)
    AN10041511
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    09122834
  • NDL Article ID
    6193523
  • NDL Call No.
    Z17-1062
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
Page Top