静電気を除去する低ノイズクリーンイオナイザの開発  [in Japanese] Development of Anti-electrostatic Air Ionizer with a Low Level of Electromagnetic Noise and Particle Generation  [in Japanese]

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Author(s)

Abstract

In the manufacturing processes of electric devices and systems, anti-electrostatic technology is applied to prevent production yield reduction due to electrostatic charge. Ionizers with corona discharge electrodes which emit air ions neutralize electrostatic charge. High voltage sources and cables of ionizers generate noises due to ESD (Electro-static Discharge), which cause deterioration and malfunctions of electric devices and systems. We have developed a low noise air ionizer with single crystal silicon emitters which generate corona-discharge at 6 kV AC voltage of 50/60 Hz. The count of particles with diameter larger than 0.05 μm measured at 22 cm away from the emitter was less than 70 count/m<SUP>3</SUP> (2 count/ft<SUP>3</SUP>) during continuous 6-month operation. The deterioration rate of the Si emitters was about 0.8 μm /month.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 17(2), 105-114, 2002-06-20

    Japan Association of Aerosol Science and Technology

References:  4

Codes

  • NII Article ID (NAID)
    10008837134
  • NII NACSIS-CAT ID (NCID)
    AN10041511
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    09122834
  • NDL Article ID
    6193544
  • NDL Call No.
    Z17-1062
  • Data Source
    CJP  NDL  J-STAGE 
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