MEMS用ミクロンサイズ超微小材料に対する疲労および破壊靭性評価試験装置の開発  [in Japanese] Fatique and Fracture Toughness Testing Equipment of Micro-Sized Specimens for MEMS Applications  [in Japanese]

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Author(s)

Journal

  • Materia Japan

    Materia Japan 40(2), 184-186, 2001-02-20

    The Japan Institute of Metals and Materials

References:  3

  • <no title>

    TAKASHIMA K.

    Proc. Fatigue '99 1871, 1999

    Cited by (1)

  • <no title>

    HIGO Y.

    Proc. MRS 605, 241, 2000

    Cited by (1)

  • <no title>

    TAKASHIMA K.

    Proc. Microscale Systems 32, 2000

    Cited by (1)

Codes

  • NII Article ID (NAID)
    10008845255
  • NII NACSIS-CAT ID (NCID)
    AN10433227
  • Text Lang
    JPN
  • Article Type
    NOT
  • ISSN
    13402625
  • NDL Article ID
    5680368
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-313
  • Data Source
    CJP  NDL  J-STAGE 
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