AFMによる薄膜の耐摩耗性・密着性の評価法  [in Japanese] Wear Durability and Adhesion Evaluation Methods for Thin Films by Atomic Force Microscopy  [in Japanese]

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Author(s)

    • 梅村 茂 UMEMURA Shigeru
    • 千葉工業大学工学部精密機械工学科 Department of Precision Engineering, Faculty of Engineering, Chiba Institute of Technology

Journal

  • Materia Japan

    Materia Japan 40(10), 867-870, 2001-10-20

    The Japan Institute of Metals and Materials

References:  7

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008847150
  • NII NACSIS-CAT ID (NCID)
    AN10433227
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    13402625
  • NDL Article ID
    5952765
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-313
  • Data Source
    CJP  CJPref  NDL  J-STAGE 
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