円型表面波プロセスプラズマ装置の放電特性に関する数値計算および実験研究  [in Japanese] Numerical analysis and experimental investigations of discharge characteristics of ring dielectric line surface wave processing plasma apparatus  [in Japanese]

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Author(s)

Journal

  • The Transactions of the Institute of Electrical Engineers of Japan. A

    The Transactions of the Institute of Electrical Engineers of Japan. A 122(7), 639-649, 2002-07-01

    電気学会

References:  31

Cited by:  1

Codes

  • NII Article ID (NAID)
    10008847591
  • NII NACSIS-CAT ID (NCID)
    AN10136312
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03854205
  • NDL Article ID
    6204528
  • NDL Source Classification
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL Call No.
    Z16-793
  • Data Source
    CJP  CJPref  NDL 
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