Direct Atomistic Observation of Reactions in Metal/Semiconductor Interfaces by STEM

• Tanaka Nobuo

  Graduate School of Engineering, Nagoya University

• Zaima Shigeaki

  Graduate School of Engineering, Nagoya University

• Yasuda Yukio

  Graduate School of Engineering, Nagoya University

Bibliographic Information

Other Title

• 金属/半導体界面反応のSTEMによる原子直視観察

Journal

• Materia Japan

  Materia Japan 40 (12), 992-992, 2001

  The Japan Institute of Metals and Materials

Keywords

• high-angle annular dark field-scanning transmission electron microscopy
• metal/semiconductor interface
• Zcontrast
• Ti/Si<SUB>1-x</SUB>Ge<SUB>x</SUB>/Si
• interfacial reactions

Details

• CRID: 1390001204079204864
• NII Article ID: 10008847761
• NII Book ID: AN10433227
• DOI: 10.2320/materia.40.992
• ISSN: 18845843
• ISSN: 13402625
• Web Site: https://www.jstage.jst.go.jp/article/materia1994/40/12/40_12_992/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles