64MDRAM-O-N-O 膜のナノメーター分析  [in Japanese] Elemental Analysis of O-N-O Dielectric in nm-scale  [in Japanese]

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Author(s)

Journal

  • Materia Japan

    Materia Japan 40(12), 993, 2001-12-20

    The Japan Institute of Metals and Materials

References:  2

  • <no title>

    PARK K. -H.

    Inst.Phys.Conf.Ser. 146, 575, 1995

    Cited by (2)

  • <no title>

    KAWASAKI M.

    J. Electron Microsc. 47, 477, 1998

    Cited by (4)

Codes

  • NII Article ID (NAID)
    10008847762
  • NII NACSIS-CAT ID (NCID)
    AN10433227
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    13402625
  • Data Source
    CJP  J-STAGE 
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