3D Observation of LSI Device by High Voltage SEM

• Kamino Takeo

  Hitachi Science Systems, Ltd.

• Yaguchi Toshie

  Hitachi Science Systems, Ltd.

• Asayama Kyoichiro

  Semiconductor Group, Hitachi Ltd.

Bibliographic Information

Other Title

• 高電圧SEMによるLSIデバイスの3次元観察

Journal

• Materia Japan

  Materia Japan 40 (12), 1001-1001, 2001

  The Japan Institute of Metals and Materials

Keywords

• lage-scale intergraled circuit device
• 3D observation
• high voltage scanning electron microscopy

Details

• CRID: 1390001204079156352
• NII Article ID: 10008847786
• NII Book ID: AN10433227
• DOI: 10.2320/materia.40.1001
• ISSN: 18845843
• ISSN: 13402625
• Web Site: https://www.jstage.jst.go.jp/article/materia1994/40/12/40_12_1001/_pdf
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles