干渉型ディスプレーデバイスの駆動性能向上 Driving performance improvement of the interferometric display device (IDD)
Performance of the IDD, which is one kind of display device, has been improved. The IDD consists of a driving half mirror and a substrate mirror, which construct an interferometer. It is possible for the IDD to create all the colors of the rainbow in only one pixel. To realize the device, a parallel driving and a precise flatness are required for the driving mirror. To solve those problems, a new structure is proposed in this paper. With respect to the new structure, light interference in the pixel is caused by an optical path difference between the driving half mirror suspended by leaf-springs and a floating half mirror isolated electrically by SiO<SUB>2</SUB> layers. The driving mirror can be moved by the voltage applied between the driving mirror and a transparent electrode which is located under the floating mirror. This structure contributes to the removal of the hysteresis mirror movement, realization of stable driving and higher display contrast. By experiments using fabricated IDDs, improvements of interferometric characteristics and hysteresis property are confirmed.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 122(7), 369-373, 2002-07-01