GaNのドライエッチング技術  [in Japanese] Dry etching of GaN  [in Japanese]

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Author(s)

Journal

  • 應用物理

    應用物理 69(11), 1337-1338, 2000-11-10

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Codes

  • NII Article ID (NAID)
    10008979670
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    NOT
  • ISSN
    03698009
  • Data Source
    CJP 
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