ラダー電極を用いた大面積均一VHFプラズマの生成と製膜への応用  [in Japanese] Production of large-area uniform VHF plasma with ladder electrodes  [in Japanese]

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Author(s)

Journal

  • 應用物理

    應用物理 70(4), 438-442, 2001-04-10

    応用物理学会

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Codes

  • NII Article ID (NAID)
    10008980980
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    Journal Article
  • ISSN
    03698009
  • NDL Article ID
    5730542
  • NDL Source Classification
    ZM17(科学技術--科学技術一般--力学・応用力学)
  • NDL Call No.
    Z15-243
  • Data Source
    CJP  CJPref  NDL 
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