VHF駆動によるマイクロプラズマの生成技術とマイクロ化学分析システムへの応用  [in Japanese] Production of VHF driven microplasmas and its application to micro total analysis systems  [in Japanese]

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Journal

  • OYOBUTURI

    OYOBUTURI 70(4), 452-453, 2001-04-10

    The Japan Society of Applied Physics

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