Possible Mechanism of Crack Initiation in Micro-machining of Silicon
Journal
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- Proc.1996 ASPE Annual Meeting
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Proc.1996 ASPE Annual Meeting 14 65-, 1996
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Details 詳細情報について
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- CRID
- 1573105974652599552
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- NII Article ID
- 10010081015
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- Data Source
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- CiNii Articles