Subwavelength Antireflection Gratings for GaSb in Visible and Near-Infrared Wavelengths

• Kanamori Yoshiaki

  Department of Mechatronics and Precision Engineering, Tohoku University

• Kobayashi Ken-ichi

  Department of Machine Intelligence and Systems Engineering, Tohoku University

• Yugami Hiroo

  Department of Machine Intelligence and Systems Engineering, Tohoku University

• Hane Kazuhiro

  Department of Mechatronics and Precision Engineering, Tohoku University

抄録

We fabricated a two-dimensional subwavelength grating (SWG) on a GaSb substrate. The SWG was patterned by electron-beam lithography and etched by a fast atom beam with SF₆ and Cl₂ gases. The SWG consisted of tapered gratings with a 350-nm-period and a 1280-nm-deep groove. The reflectivity at wavelengths from 500 nm to 2300 nm was measured and compared with the results calculated on the basis of rigorous coupled-wave analysis (RCWA). At wavelengths from 500 nm to 2000 nm, the SWG decreased the reflection as much as 5 to 10% from the original value of approximately 40% of the GaSb substrate. The thermal stability of the SWG was also studied by measuring the reflection spectra of heated samples.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 42 (6B), 4020-4023, 2003

  The Japan Society of Applied Physics

キーワード

• subwavelength gratings
• fast atom beam
• rigorous coupled-wave analysis
• antireflection

詳細情報

• CRID: 1390001206256734208
• NII論文ID: 10011257700
• NII論文ID: 210000053714
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.42.4020
• ISSN: 13474065
• ISSN: 00214922
• NDL書誌ID: 6588341
• Web Site: http://id.ndl.go.jp/bib/6588341
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6588341
• Web Site: http://stacks.iop.org/1347-4065/42/i=6S/a=4020/pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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  • KAKEN
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